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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

자동정밀스테이지

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Large Size Stage Ⅱ large split type Stage

·Split Type Stage (for Laser Application)

·Dual Head, Align Vision, Inspection System

·Stroke of Table : 2,200mm

·Stroke of Head : 1,100mm


 Item

Spec.

 Guide

LM Guide

Max. Speed

750mm/s

Acceleration

1.5G

 Accuracy

< ±1㎛

Repeatability

< ±0.5㎛

Horizontal Straightness

< ±5㎛

 Vertical Straightness

< ±5㎛

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