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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

자동정밀스테이지

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High-precision stage Ⅰ Air bearing Stage

·Air bearing & Magnetic Preload Stage for Lithography

·Straightness of Scan : < ±1㎛@1,200mm

·Worktable Size : 600×600mm (Depend on Request)

·Repeatability : < ±0.2㎛ 


 Item

Spec.

 Guide

Air bearing & LM Guide

Max. Speed

500mm/s

Acceleration

0.3G

 Accuracy

< ±2㎛

Repeatability

< ±0.2㎛

Horizontal Straightness

< ±1㎛@1,200mm

 Vertical Straightness

< ±3㎛@1,200mm

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