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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

자동정밀스테이지

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High-precision Stage Ⅱ stack XY Stage

·Straightness of Scan : < ±1.5㎛@600mm (w/o Soft Compensation) 

·Flatness of Table : < ±5㎛@300mm (X&Y)

·Yaw of Scan : < ±2arcsec@600mm


 Item

Spec.

 Guide

LM Guide

Max. Speed

500mm/s

Acceleration

0.5G

 Accuracy

< ±1㎛

Repeatability

< ±0.5㎛

Horizontal Straightness

< ±1.5㎛@600mm

 Vertical Straightness

< ±3㎛@600mm

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