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PRODUCT
우수 인재와 혁신 기술로 고객 가치를 실현하는 파트너 기업

자동정밀스테이지

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Multi-function Stage Ⅱ split type Stage

·Installed Dual Type Laser Head (Multi-functional Laser Application)

·1G Acceleration & 1m/s Speed in X,Y direction

·Repeatability of DD Theta Table : < ±2arcsec


 Item

Spec.

 Guide

LM Guide

Max. Speed

1,000mm/s

Acceleration

1G

 Accuracy

< ±2㎛

Repeatability

< ±1㎛

Horizontal Srtaightness

< ±2㎛

 Vertical Straightness

< ±3㎛

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