Multi-function Stage Ⅱ
High acceleration Stage
·Laser Motion Guided Split Stage
·Acceleration of Head and Table : >2G
Item | Spec. |
Guide | LM Guide |
Max. Speed | 1,000mm/s |
Acceleration | 2G |
Accuracy | < ±2㎛ |
Repeatability | < ±1㎛
|
Horizontal Straightness | < ±3㎛
|
Vertical Straightness | < ±5㎛ |
