관련링크
본문
High acceleration Stage
·Laser Motion Guided Split Stage
·Acceleration of Head and Table : >2G
Item | Spec. |
Guide | LM Guide |
Max. Speed | 1,000mm/s |
Acceleration | 2G |
Accuracy | < ±2㎛ |
Repeatability | < ±1㎛ |
Horizontal Straightness | < ±3㎛ |
Vertical Straightness | < ±5㎛ |
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